Yılmaz, M., Zervas, M., Alaca, B.E., Yalçınkaya, A.D., Leblebici, Y., “Design and integration of a bimorph thermal microactuator with electrostatically actuated microtweezers”, Proceedings of the 4th International Conference on Ph.D. Research in Microelectronics (PRIME'08), İstanbul, 2008.

Yayın Tarihi: 
Salı, 1 Ocak, 2008
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